Design Of Si Substrate Micro-gyroscope With Electrostatic Driven Meso- Piezoresistive Detection And Measurement Of Related

The micromachined gyroscope are broadly used in the inertial measurement fields due to the advantages of small size, low power consumption and high reliability. The resonant tunneling devices is a new meso-piezoresistive device which based on the molecular beam epitaxy (MBE) technology , which the piezoresistive sensitivity is one order higher than the silicon and and less affected by the temperature. So the sensitivity of gyroscope will be improved if using the resonant tunneling devices in the research. A novel structure gyroscope is designed based on tunneling devices. By combining with the technology of heteroepitaxy GaAs thin film on silicon which is not only achieve the integration of tunneling device with gyroscope, but also achieve the fabrication of gyroscope structure with high aspect ratio by the mature processing technology Si.The working principle and dynamic equations of micromachined gyroscope are introduced and analyzed in the work. At the same time, the principle of electrostatic driven and meso-piezoresistive detection are discussed. The gyroscope structure with Si substrate heteroepitaxy GaAs materials is proposed, which the gyroscope structure and the sensitive components are fabricated by silicon material and GaAs material respectively. The structure parameters of micromachined gyroscope are determined by lots of theory analysis and simulation research. It is verify that the structure is reasonable according to the study of gyroscope natural frequency and the analysis of structure damping. In order to obtain a higher sensitivity, the position of sensitive components is determined through path analysis.After the introduce of key process in details and according to the present process technology, the fabrication process and territory of gyroscope is presented , which the sensitive components structure and gyroscope structure used the surface processing technology and bulk processing technology . Surgery.Based on the studied results of our research group, the key characteristic of a electromagnetic driven and meso-piezoresistive detection gyroscope is tested. It is verify that the sensitivity element RTD has negative-resistance effect, and the driven frequency of gyroscope is about 4KHz. In the range of the -1000-0°/ s and 0-1000°/ s, the sensitivity of gyroscope is 9.96μV /°/s and 9.45μV /°/s, respectively by using the triaxial turntable.