Research About Strain Characteristics Of Pzt Films Based On White Light Interferometry Technology

The rapid development of Microelectromechanical systems (MEMS) provides a good opportunity for the development of mechanical and provides development opportunities for its research.Because the mechanical problems of MEMS packaging process mainly due to residual stress in materials and, therefore, stress-strain tests of MEMS product in the package will be the deciding factor of secure and stable. This article studies the test by the strain testing, establishment of micro-mechanical model of the test structure and providing the reliable basis for the design of the micro-structure, according to the scale effect on the micro-structure. So it can accelerate the development of MEMS technology and accelerate the market process, and it can serve humanity better. Specific results were as follows:1, This article proposeds Stoilov algorithm, according to analysis the advantages and disadvantages of the traditional white light vertical scanning algorithm (VSI) and phase shifting interferometry algorithms (PSI). The Stoilov algorithm has very good inhibitory effect for the second order, third-order nonlinearity, which inherent in the test system, and the Stoilov algorithm can also select the test trails phase shift value arbitrarily in order to improve the test accuracy, according to the need of test requirements, and the Stoilov algorithm can achieve a hundred nanometer vertical resolution.2, This article analysis the feasibility of strain measurement from the theoretical, by establishing mathematical model, and then we use the POLYTEC Micro System Analyzer to test the PZT film, which is not loaded voltage and loaded with different voltages, and calibration out the strain effect of different voltage values. Finally, we use the Linnik interferometer to test PZT thin films, in order to verify the accuracy of the algorithm, which this article proposed for solving three-dimensional topography. And the verification result can explain the feasibility of the strain measurement algorithm. It can achieve the strain distribution test of the PZT thin films, by Linnik interferometer and combined with the strain algorithm which, this article proposed. The test method can remedy the defects of strain distribution test, which inherent in the POLYTEC Micro System Analyzer. The test method can provide experimental evidence and theoretical support for MEMS design and processing.3, This article achieve the strain measurement interface design programming and editing by MATLAB software, and the interface can carried out on the algorithm design and analysis, and can achieve a friendly man-machine dialogue.