Research On The Design Of Microscopic Profile Detection System Based On White Light Interference

With the development of ultra-precision manufacturing technology,conventional detection methods can not meet the requirements because of the characteristics of micro and nano scale,difficult direct contact,micro surface effect and large location error.The scanning white light interference detection technology that has the characteristics of high resolution,fast speed,large range and non contact is becoming a hot spot of ultr-precision detection.In this work,based on the scanning white-light interference,a micromorphology detection system was developed,which can satisfy the engineering specifications.Firstly,the surface roughness,the white light interference detection and the three-dimensional topography restoration algorithm were researched.Furthermore,the mechanical structure of test system was designed.Contrast to the metallographic microscope with small probe range,the spatial layout of mechanical system was optimized and the automation was realized in our interference device.Secondly,an adjusting apparatus with compact structure as well as a micro-displacement apparatus with flexible structure were developed,which can realize continous switching filter and vertical scanning,respectively.Moreover,an interference fringe adjustment mechanism was designed to regulate the rotation,horizontal movement and thickness of interference fringes.Then,the finite element analysis with Workbench was carried out for the key mechanical components,and the results demonstrated the rationality and reliabilityof the designed mechanical structure.Thirdly,the related software was developed,which achieve the motion control of the electric translation platform,the scanning control of shifter and the capture control of interference image.Besides,the experimental data was processed and then displayed the three-dimensional topography in formation through the software.Finally,the performance of this device was validated with experiments.The precision of single carved mouldings and standard roughnesss amples were measured for several times,which showed an error less than 5 percent.Moreover,the three-dimensional topography restore of standard photovoltatic devices were performed,and the relevant indexes reach the expectation.