Basic Research On Composite Current Driven Permanent Magnet Synchronous Planar Motor

Permanent magnet synchronous planar motors use electromagnetic plane produce planar motion directly, so it have high density, low heat consumption and high precision features. Compared with conventional two-dimensional plane positioning device, planar motors have many advantages such as fast response, high sensitivity, good mobility and simple structure, so it have a broad application prospects in the modern semiconductor micro-fabrication equipment and other ultra-precision two-dimensional plane positioning device. This paper proposed a new permanent magnet synchronous planar motor drived by a current which complex of nine phase.We will research on the following aspects.First, we build the mathematical model of the permanent magnet synchronous planar motor, using the scalar magnetic potential and the boundary conditions analysis the magnetic field which is generated by the permanent magnet array, obtained the expression of the magnetic flux density in the air gap through equivalent and simplified, then we derive the expression of the electromagnetic force and the back electromotive force which are generated by the planar motor according to Los Lenz power law and Faraday's law of electromagnetic induction. Also the motor voltage equations is established.Secondly, study the design method about planar motor of this type based on previous analytical, derive the magnetic design process, determine the major size of the planar motor, analysis the relationship between the electrical properties and the structural parameters, definite the design ideas of the coil and the permanent magnet. We build the finite element simulation model of the single planar motor through the instrumentality of Maxwell 3D. Using finite element method analysis the impact of magnetic boundary, permanent magnet thickness and coil cross-section parameters on the electrical properties, that provide theory to the optimal design of the motor.Finally, reference to the previous design method, a prototype motor is designed and processed, and experiment on the prototype motor use of laboratory existing conditions, measuring magnetic field, static thrust, and no-load EMF waveforms of the prototype motor. At last the experimental results and simulation results are compared to verify that the prototype design is reasonable.