| Electrostatically levitated micro-gyroscope is one kind of MEMS devices composed of a flat rotor and some stator electrodes (including suspending, rotating and detecting electrodes). The micro-gyroscope based on two working ways, one is the high-precision spherical rotor supporting way, and the other is the disk-shaped rotor classical work way. Compared with the vibrating gyroscope, it has potential advantages of high accuracy, which shows broad application prospects.Hardware in-the-loop simulation technology based on LabVIEW and virtual instrumentation has currently been widely used in various industrial fields. The main topic of this article is the study of application on electrostatically suspended micro-gyroscope system based on LabVIEW simulation technology. The main contents and conclusions include:Describe research survey, application prospects, and detection and control methods of electrostatically suspended micro-gyroscope. Its structure, processing materials, working principle and process flow are also described. Illustrate the application of LabVIEW Simulation in control of electrostatically suspended micro-gyroscope through a phase demodulation example. Experimental result is consistent with theoretical analysis, which proved application of LabVIEW simulation in the micro-gyroscope is feasible.Describe the system model and control method of electrostatically suspended micro-gyroscope. Control of gyro's three degrees of freedom of z-axis is simulated by the use of centralized control strategy based on LabVIEW, verifying the feasibility of centralized control strategy.Set up virtual instrument in-the-loop simulation platform based on laboratory conditions and LabVIEW software code for detecting and controlling, and conducts a preliminary data acquisition and output control experiments. Hardware in-the-loop simulation technology based on virtual instrumentation will play a more important role in the future for prototype validation of sensors and controllers.
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