System-Level Simulation Of A Micromachined Electrostatically Suspended Gyroscope And Multiple Synchronizing Dds Signal Generator

Levitated rotor gyroscope has higher precision, and becomes a new MEMS device with good prospect, with some research results in USA, Japan and Britain and so on. Based on gyro effect of high speed rotor, micro levitated rotor gyroscope measures angular speed of a carrier, as well as linear acceleration.Key technologies of realizing electrostatic suspension micro gyroscope mainly include simulation technique and micro mechanical manufacturing technology and rotor's micro displacement detection technology and its stability suspended technology, constant speed rotary control technology, etc. This thesis researches and makes analysis on the related technology of micro electrostatically levitated rotor gyroscope, and simulated this gyroscope at system-level with CoventorWare.The main research contents and results of the thesis are as follows:This paper firstly introduces the classification and characteristics of micro gyroscope, focusing on the magnetic suspension rotor and electrostatic suspension rotor microgyroscope and the research progress of electrostatic suspension gyro. Then analyze the design simulation technique and micro displacement capacitance detection methods and carrier signal producing technology.Secondly descriptions are given to electrostatic suspension gyroscope structure and the working principle of a microgyroscope. Combined with capacitance measuring principle, illustrate the capacitance detection in application of a microgyroscope, and equivalent control model design.Again, this micro electrostatically levitated rotor gyroscope is constructed based on CoventorWare, with which MEMS devices develop faster, higher quality, lower cost and easier optimizing, combining behavioral 3D models and IC components together. In CoventorWare, uses the technique 3D modeling, with the finite element analysis method, analyzes its damping function in gyroscope and various electrodes capacity distribution.And using mechanical and electronic module of CoventorWare software, to establish a micro-devices level model with control circuit, constructs a microgyroscope system-level model for the gyroscopic effect system-level simulation.The signal generator is an essential part of the electrostatically suspended microgyroscope system. Differential capacitance detection method is usually applied to get the micro displacement of rotor, whose amplitude demodulation need stable multi-channel synchronous signals. This signal generator, is based on ARM7 LPC2148, can control multi AD9850s to produce multi-channel signals whose frequency and phase controllable precisely with either parallel load or serial load method, characterized by high frequency stability, accuracy, resolution and phase precision.