| The triaxial micro-accelerometer is an important constituent of inertial navigation system and has a variety of applications in many fields such as weapons, navigation, safety, automation, etc.Most domestic micromachined accelerometers employ comb structures, which are fabricated by dry etching. It's difficult to reach a high fabrication precision and uniformity. A monolithic integrated triaxial micro-accelerometer which is fabricated by anisotropic wet etching is designed in this dissertation. This accelerometer is attractive due to its potential good performance and simple fabrication process. This dissertation focuses on the operating principle, configuration design, fabrication, errors and measurement of the triaxial micro-accelerometer. Subsequent research contents are included in this dissertation.1. The structure details of the triaxial micro-accelerometer is presented, and the structure design theory of this accelerometer is studied, which includes analyzing the mechanical characteristic of the slanted cantilever, calculating the drive and sense mode frequencies, etc. The dimensions of this accelerometer are worked out according to the structure design theory and fabrication conditions. The designed accelerometer is analyzed with theoretical and finite element method.2. The fabrication progress of this triaxial micro-accelerometer is designed by solving several key problems. Several samples are fabricated.3. The methods of detecting the mode and signal of the accelerometer are studied. The detection systems are designed and the mode and signal of accelerometer are tested. Frequencies of the four masses in accelerometer are 1.910 KHz , 1.930 KHz , 2.037 KHz and 1.937 KHz . The test result also proves that the accelerometer can detect acceleration.4. The errors of fabrication and algorithm of accelerometer are analyzed and solved. A new scheme of structure is presented after studying the damping characteristics of the accelerometer.
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