Structure Design And Fabrication Technology Optimization Of A Monolithic Triaxial Micro-accelerometer

With the improvement of missile guidance and navigation technology, the silicon micro-accelerometers get more and more application in both military and civilian areas. The monolithic 3-axis silicon micro-accelerometer has the ability to detect the acceleration along three axis at the same time. Further more, it has the advantages of smaller size, lower cost and so on with the 3-axis micro-accelerometer composed with three single-axis accelerometers. So, more and more research are focused on it.The accelerometer research in our laboratory has experienced four editions. All of them have improved the design of accelerometer in basic structure, detecting circuit, packaging style, data disposal and so on. However, the performances of the device still have a great difference with the target. This paper makes a deeper research based on the former study, and finished the research contents as following.1. Structure optimization. Including the dwindlement of the device's size, the design of the stress releasing structure, and the novel glass-si-glass sandwich structure.2. Fabrication techniques optimization. Including the novel convex corner compensation in anisotropy etching on silicon, a new method to avoid adsorption between the glass and silicon, an effective method to realize the special bonding of the sandwich structure. All the above designs are focused on the fabrication techniques adjust to the sandwich structure.3. Detecting circuit optimization. By comparing and testing the normal detecting circuit, the circuit applied on the accelerometer was ascertained.4. Decoupling arithmetic optimization. By analyzing the error between the actual and perfect system, the mathematic model of the device was built.5. Basic testing for the accelerometer prototype. By taking basic testing for the device, the availability of the optimizations above is validated.