Research On The Micro Displacement Driving Control Technology For Piezoelectric Ceramics

With the advantages of the high frontier of science and technology,Micro-positioning System technology is developing constantly.Piezoelectric ceramic actuator is more and more used in driven nano-displacement platform.The nano-displacement platform can be used in sensor static calibration,and tend to be used in sensor dynamic calibration.PZT driving power is the key equipment of the nano-displacement platform.This paper analysed the major Techniques of domestic and foreign Piezoelectric Power.On this basis,the different methods of drive power for the piezoelectric ceramics is understanded.Based on error amplification principle,PZT driving control system is designed.The main research is given as follows:1.Piezoelectric analog amplifier module design:Based on error amplification principle,piezoelectric amplifier is designed.The design includes error amplier,voltage follower,power amplier,feedback network.Simulation,Device Selection,parameter adjustment is completed.In order to increase the drive circuit output stability,±150V voltage regulator circuit is designed.Accroding to the PZT as the capacitive load of the PZT power,R_ISO and C_L compensation and feedback zero compensation is designed to ensure stability for capacitive loads.Dual-follower output driver power is used to enhance the supply current output capacity,so the dynamic response speed of the driving power is better.2.PZT digital control module design:The DSP6000 series CPU as the main chip, designed with the PCI interface functions of the drive control module. For the PZT digital control system requirements,a 24bit data acquisition module circuit, digital-analog conversion circuit based on SPI bus are designed.Study the DM642's PCI interface to data acquisition capabilities.3. To test this system to achieve the various functions, Designed a series of experiments used to validate the indicators of each module. Analog amplifier module with 1.4mV/2h stability, 0.5mV of repeatability, under 3.3μF load with 100Hz dynamic characteristics. D/A module drive control card with the resolution and stability of 20μV, A/D module with 1.3mV stability.