Research On Amplification Structure Of Micro-positioning System Based On Piezoelectric Ceramic Control

Since the 21 st century,micro-positioning system has played an increasingly important role in the fields of ultra-precision machinery,precision instrument manufacturing,biomedical devices and semiconductor fabrication.Piezoelectric ceramics are displacement input devices of micro-positioning system.It is of great practical significance to analyze and study the displacement output control method of piezoelectric ceramics for high precision control.The micro-positioning system is composed of piezoelectric ceramic devices with actuating structure and displacement amplifying mechanism.Under different application conditions in different fields,the design and development of appropriate piezoelectric ceramic control power supply and mechanical amplifying structure is of great value for the realization of high-precision positioning of micro-positioning system.Based on the positioning control of lithography micro-displacement platform,the piezoelectric ceramic amplifier and driving power supply are studied as follows:Firstly,the basic principle of the displacement amplification structure is analyzed,and a voltage-controlled electrolyte is designed to realize the two-way output of the displacement amplification mechanism by changing its physical characteristics.Through theoretical calculation and software simulation,it is concluded that the amplification structure has good feasibility.Through this new output displacement amplification structure,the purpose of controlling displacement direction and simplifying control scheme can be achieved.Secondly,according to the requirements of the project,the parameters of the driving power supply of piezoelectric ceramics are analyzed and the feasibility is verified.A linear amplifier circuit with PA92 bit core is designed.Bipolar structure amplification is used to compensate the offset voltage,isolation resistance is used to optimize the output signal linearly,and capacitance advance compensation is used to drive large capacitive load.The simulation results verify the feasibility of the design scheme.Thirdly,the output characteristics of the piezoelectric ceramic drive power supply are verified,and the step response,the linearity of the output signal and the dynamic response of the drive power supply are analyzed respectively.The results show that the output voltage has a good dynamic effect in the range of 0~100V when the load capacitance is 0~0.6?F,and the output voltage accuracy is 0.5mV.The driving power supply has good stability.In summary,based on piezoelectric ceramic drive as the core,the displacement amplification structure and drive control circuit are analyzed in this paper.The results show that the displacement amplification structure can achieve double displacement amplification output,and the output precision of the driving circuit can reach 0.5mV within 0 ~ 100V of the driving power supply.