Research On DUV Radiated Light Source Driving Circuit

With the development of technology and the progress of photonics, more and more light sources are applied in every corner of industry. In lithography and laser technology, deep ultraviolet light(DUV) is a UV light source wavelength shorter than 300 nm. This kind of light source good stability, long cycle life, small size and very easy to use, has been widely used in organic chemistry, biochemistry, pharmaceutical analysis, food inspection, health care, life sciences and other fields of production and research work. In these applications, the requirements of the stability of DUV source radiation intensity are very high. This light source to be applied to practice, the stability of the light source will directly affect the accuracy of the instrument or equipment work. In most of the usage of DUV source, the stability of DUV source plays an key role in the scale of its application. Therefore, we should optimize the design of the driving circuit according to the actual situation. M.Wenstead has pointed out that the spectral instruments is not stable, above 90% is due to the instability caused by the drive circuit. Therefore improve the stability of DUV source power supply is very important to the application. So the subject was researched against this background.In this paper, the DUV light source power supply was designed according to the work principle and application, and based on the requirements of standard light source and combined the technology of switch power supply and constant current source, so that the light source is capable of providing a continuous spectrum of 180-2000 nm. Based on the characteristics of DUV radiation source and the driving principle of the power supply, the function of each module in the main circuit are designed, simulated, and according to the requirements of the simulation results and the design index, selection of key components. The parameters of drive circuit supply circuit were designed in detail and related experiments were carried out; In order to realize the high stability of the drive circuit, many factors were studied from the circuit selection, the optimization of devices, the thermal stability and EMI. According to experiment result, various factors of influence DUV drive circuit accuracy were analyzed. On the basis of the design of the hardware, complete the corresponding software design, writing and debugging, light can be adjusted by controlling the duty cycle of the PWM waveform.Finally, this paper completes the design of hardware circuit and software part of the drive circuit, and completed the physical production. The drive circuit is debugged, through the analysis debugging results and the corresponding waveform shows, hardware circuit and software design of the system design is correct, it can meet the technical Specifications.