Research On Integral Scattering Measuring Instrument For Ultra - Smooth Surface

The quality of the reflector surface has effect on the lockout threshold of laser gyro, and the precision is determined. With the expansion of production, the artificial detection is exposed problems such as large randomness, low efficiency and so on. Thus, develop a fast test and positioning instrument of the defects on the supersmooth surface has great significance.In this paper, based on the principle of integral scattering measurement, the research studies the key problems such as stray light disturbance, light source power fluctuation and scattered light direction in the simulation. According to the study, the redesign of hardware and software in the engineering prototype is completed. Also,the preliminary tests and adjustment of the prototype is completed.In order to solve the problem of power fluctuation of light source, this paper studies the stability of the light sources and the advantages and disadvantages of different light mode, and designs the chopper and the optical light path.In order to solve the disturbance of stray light,the research uses FRED software modeling the test optical path, and studies stray light performance under different incident positions. Based on the study, the confocal microscopy group is designed, and the simulation experiments verified the stray light shielding effectiveness, the stray light coefficient is less than 0.01. In order to determine the direction of scattered light and the position of defect positioning needs,the advantages and disadvantages of different stage combination regimen are analyzed,and the Multi-angle scan test method is optimized.In order to solve the problem of coordinate transformation, the research studies the correlation between the target point and the test data points, and designs the coordinates after rotation alignment algorithm. Also the development and debugging of the testing software are completed.At last,the instrument is assembled and some samples are tested, the experimental results show that the instrument test results are consistent with the manual test results, test data repeatability is better than 6%, which has reached the goals of this instrument.