Grow Diamond Film On Quartz Glass Using MPCVD

This paper introduce the construction, the property, the application of the diamond film , and some familiar preparation method which preparation the diamond film using chemical vapor deposition.The research introduced a domestic microwave plasma chemical vapor deposition (MPCVD) equipment with a quartz glass window and water-cooled stainless steel reaction chamber in 2450MHz/5 Kw. The machineries and function of the sub-systems, including microwave system, gas-route system, vacuum system detecting system, and safeguard system, were also discussed.The important application of diamond film is using the windows materials coat. Because the glass is easy to be stain ,it is very disadvantage to grow high quality diamond film .influence the diamond film application, and like commonly ,rubbing the quartz glass can not improve the nucleus density, so it is very hard to grow high quality diamond film, and the quartz glass contain too much oxygen ,it is very disadvantage to diamond growth. And these limit the diamond film application .In order to grow high quality diamond film ,this experiment using cleanout and negative bias to improve nucleus.Effects of methane concentration, deposition pressure, gas flow rate and substrate temperature on diamond coating on quartz glass by MPCVD were studied systemically. The best parameters were established by experiments.Now ,the most popular method which grow diamond film on quartz glass is using vaporize plate to grow transition layer to improve diamond film growth from contain carbon vapor source (C60 or C70 et al) in the nucleus time all over the world ,so it is important to improve the nucleus density for diamond film grow on the quartz glass. This work using negative bias to improve the nucleus density ,and quartz glass was used as a kind of depositional substrate and diamond was deposited upon it in an MPCVD equipment. The diamond coating was characterized by XRD SEM Rama XPS. The experimental results show that the mostly component of the film is diamond, and the results show that the SiC is exist .It show that the diamond film not grow directly on the quartz glass , there exist the SiC transition layer. And on the transition , diamond film grow.