Study On The Preparation Of Thin Film Inductors

' We tried to prepare the aircore meander type thin film inductors to increase thefrequency that can be used .We prepared them with masks and by magnetronspllttering .Wthollt the magnetic material we got large inductance by properlychoosing the size parameter .The change of the size parameter does not influencethe frequency that can be used,so we can improve the quality factor in the same time.Other more we made series inductors to increase the inductance in the same area. Theinductance of them are increased greatly. We prepared sample l, sample 2 with singlecoil. and sample 3, samPle 4 with two series coils. In this paPer we discussed thefrequency-dependence of theis inductance,resistance and quality factor (Q-value) in arange of l00MHz-l0GHz. The inductance show flatness in this frequency range andthe value are l30nH, 155nH,l85nH and 280nH;The resistance are 3lO, 5lO,64Oand l04O under 6GHz.Due to the skin effect they are higher after this frequency;Thequality value are over 20 from lGHz to 6GHz,the max value of samPle 1,2and 3 arel60,l10 and l00 at about 6GHz, the max value of sample 4 are 120 at about9GHz.For the use of film inductor we made thin film transformer .It has goodfOreground though the coupling coefficient and efficiency are not very high.