Study Of The Deposition And Optical Properties Of TiO₂ Thin Films Deposited By Electronic Beam Evaporation

TiO2 has high refractive index, be transparent in the wave band of visible and has excellent chemical stability. It is one of the most important coating materials and wasused widely in recent years. So there are large Science and Application values to study the preparation of TiOz thin films.TiOi film is deposited by reactive electronic beam evaporation on the K9 substrates. Through the orthogonal experiment the Influence of technological conditions (temperature of substrate, deposition rate, chamber vacuum) to optical property of TiC>2 film was studied. The refractive indices and the extinctioncoefficient of the films have been measured by spectroscopic ellipsometry. Optical properties and structure features have been characterized respectively by UV-VIS spectrophotometer, SEM and XRD. The temperature of substrate has the most important influence on the optical properties. The optimum technique for best optical properties is that the substrate temperature is 300 癈 ,the chamber vacuum is 2xlO~2 Pa, the deposition rate is 0.2 nm/s. The thin films deposited by the optimumtechnique show excellent transmittance properties in visible region. The SEM observation shows that the TiQi films deposited by EB on K9 substrates havecolumnar fibrous.The influence of anneal to film's structure was also studied. The specimensdeposited under different temperature are annealed and the structure and optical properties are analyzed. The results indicate that the anneal can make the amorphous film structure crystallized and make the refractive indices higher, the absorption conditions are also improved. Then we got the process how to get high opticalproperties TiOi films deposited by EB on K9 glass.In order to design and deposit the multi-layer optical thin films with TiOi as the coating material. The author develop a film system design software by visual basic which can optimize thin film system by simplex method, calculate the optical performance, analysis the transmission spectrum and calculate the refractive index and extinction coefficient and thickness through the envelope method. The work principle, the program and the result are described. The author designs aTiO2-MgF2 anti-reflectance multi-layer film. The theory optical transmittance can be over 99% between the 400nm and 700nm.The specimen was trial-produced and the optical transmittance can be over 97%.