Research On Nano-precision Orientation Control Method Of 6-D Micro Table

The choice and use of driving element in the nano-orientation control system directly affect the ultimate performance target of the control system. The piezoelectric actuator becomes one of the most prospective components because of its outstanding advantage. But the hysteresis and creep character of the material restrict the development of this actuator. New stable characteristic tungsten bronze piezoelectric actuator was adopted as driving component in this article, we develop the anti-hysteresis control method through contrasting the crystal structure of the tungsten bronze actuator with which of the perovskite actuator, at the same time corresponding software and hardware were studied in order to prove the validity of this control method, and then demarcated the other characters of the actuators through lots of experiment results. Finally, multi-function capacitance sensor that will be applied in the closed loop control of the piezoelectric actuator was initially designed.