Research On Characteristics Of Piezoelectric Actuator And Structure Design Of Two Dimensional Micro-nano Positioning Stage

Micro-nano positioning technology is a key technology in modern science and industry. It has a wide application in many fields, such as precision manufacturing, ultra-precision measurement and micro-manipulation. In recent years, with the development of modern science and industry, large travelling range, high precision, small volume, and quick response become more common requirements for micro-nano positioning technology. Among these, the requirement for positioning accuracy increases to nanometer level. The level of micro-nano positioning technology reflect a nation's technology development status and the overall strength. Conduct research about micro-nano technology has a great and far-reaching significance in promoting our national high technology industries such as advanced manufacturing, ultra-precision machining and measurement and national military industry and so on.Based on the review of domestic and international research and application of micro-nano positioning system, this thesis put emphasis on theoretical analysis and experimental research of basic characteristics of piezoelectric ceramic actuator, the hysteresis nonlinearity modeling method of piezoelectric ceramic actuator, the design and analysis of two dimensional micro-nano positioning stage and the construction of two dimensional micro-nano positioning system.In the first chapter, firstly, widespread use of micro-nano positioning technology in various areas of industry and the composition of micro-nano positioning system as well as the characteristics of each component was introduced. Then the research status of characteristics of piezoelectric ceramic actuator and micro-nano positioning stage was stated. Finally, research background and main research contents of the thesis was presented.In the second chapter, the working principle of piezoelectric ceramic actuator was studied and a pre-loading device for piezoelectric ceramic actuator which can realize quantitative and safe loading was designed. Theoretical analysis and experimental research on piezoelectric ceramic actuator' characteristics of force-displacement, voltage-displacement, repeatability, creep and temperature was done.In the third chapter, Preisach model which was used to model hysteresis nonlinearity of piezoelectric ceramic actuator was stated. The emphasis was put on how to use linear interpolation method and BP neural network mothod to predict Preisach function value and solving results of the two methods was compared through simulation and experiment.In the fourth chapter, overall design scheme of the two dimensional micro-nano positioning stage was given. The key parameters of output displacement of piezoelectric ceramic actuator, stiffness, output displacement and natural frequency of positioning stage was analyzed and calculated. On the basis of theoretical analysis, geometrical parameters of the positioning stage was selected, and finite element simulation was done in ANSYS.In the fifth chapter, the two dimensional micro-nano positioning system was constructed. In order to verify the effectiveness of the design, the movement characteristic experiments of X and Y directions was carried out.In the sixth chapter, the research work was summarized.