Study For Enhancing The Precision Of Parallel Confocal Measurement

With the rapid development of the technology of MEMS, more and more micro-parts of an apparatus are measured. How to measure the 3-D surface topography of the micro-specimens quickly and accurately has become a challenge in the field of modern micro-measurement. It is possible that micro-profile quickly and high accurately is measured on the method of Confocal MeasurementThe research is based on the project sponsored by the National Natural Science Foundation of China (NSFC) and another project sponsored by Important Research Foundation of National Education Ministry of China. In this dissertation, the non-scanning whole-field confocal system and its key technologies are in-depth investigated. The work principle of parallel confocal microscopy and total structure of system are introduced firstly. Then the design of light system and setup of system are analyzed in detail. A new linear fitting method for data processing is presented in order to overcome the influences of the traditional 3-D profile measurement method. A program is finished in order to study the axial optical characteristics of a facula, and 3-D profile reconstruction is solved by the other program. Finally, the purpose, content and result of experimentation are presented .