Research On Laser Confocal Signal Acquisition And Control Technology

The analysis of optical tomography and reconstructing three-dimensional Image by computers makes confocal technique an important research method or instrument in medicine, biology, semiconductor industry, etc.The project "Research on Laser Confocal Signal Acquisition and Control Technology" is a sub-topic of key scientific and technological project of Heilongjiang Province, titled "Multi-optical Probe surface topography Measurement System ". This paper made research and design on signal acquisition and control technology of the confocal optical probe, precision vision displacement measurement and the micro-vision detection module.Firstly, this paper explains the measurement principle of differential confocal optical probe measurement system particularly, provides the general design of laser confocal measurement system and focus on carrying out circuit and mechanical structure design of two sensor systems: photoelectric conversion processing systems, precision visual displacement measuring system.Secondly,Then carries on software's overall design to the system,the software is divided into:confocal measurement module, precise visual displacement measurement module, microscopic visual module. The confocal measurement module mainly uses in acquisit the value of the focusing error signal, then, using the value to decide whether to move the lens, to chose from the two kinds of measuring ranges ;The precise visual displacement measurement module is mainly the pixel position change which created by the lens' displacement value as on linear array CCD, transforms to the reality high value; Micro-vision module is mainly to do the sequence image processing taken by the micro-vision system, and to make three-dimensional reconstruction combined with the height information of the image.Finally, Calibration Test and Ratin Test are carried out on Micro-Visual System and Precision Displacement Measurement System through the final simulation experiments, along with the data collection experiment .The results show that the system has a good performance.