The Craft Study On ZrN Decorative Coatings By Medium-Frequency Reactive Magnetron Sputtering Technique

With the development of the modern science and technology, the requisition for performance of the material improves day by day. It is a kind of economical and practical way to improve material performance that utilize film on surface antiseptic, surface decorate and surface strengthen on different tools and moulds. In recent years, because the golden thin film-zirconium nitrogen(ZrN) has the better wear resistance, better corrosion resistance, more excellent mechanical performance, better chemical and calorifical performance, more beautiful golden color, higher hardness and melting-point than titanium nitrogen (TiN), it has been already widely used in wrist-watches, spectacles frames, metal furniture, hardware, ceramic and glass products, etc.At present there has a lot of deposited methods about ZrN. As direct-current reactive sputtering technique has a hysteresis effect and positive pole's disappear, which serious influence the rate of deposition. So how to make the target maintaining higher sputtering rate at metal sputtering mode, and obtain ZrN film with suitable chemical matching and with higher deposition speed on the basis, which is a key problem that needs to be solved in sputtering ZrN film. This medium-frequency technique is a new technology that has risen in the last few years. It is a physical vapor deposition (PVD) technique which combine glow discharge, plasma and medium-frequency technique together. And it has two advantages, one is the high deposition rate which evaporation has, the other is clean base which sputtering technique has. The medium-frequency sputtering can improve the performance of the film remarkably, enhance the cohesion between film and the basis, increase performance of diffraction, decrease the film defect and been used extensively. In addition, the medium-frequency technique can prevent the arc discharge and eliminate the positive pole's disappear effectively, thus guarantee that the sputtering deposition course can go on steadily. So it has very important in industry production.This research adopt industry equipment SP-1215, introduce advanced...