The Craft Study On Color Of ZrN Decorative Coating By Mid-Frequency Reactive Magnetron Sputtering

The ZrN is an important kind of decorative thin film, which has wide applications in adornment. The color of ZrN is a key index, the experts have to do hundreds of experiments for appropriate craft, which needs a lot of time and costs. So it is a urgent question that understanding the relation between color of ZrN coating and the craft parameters, for gaining the satisfied color of ZrN decorative coating quickly.At present studies of ZrN have been focused on structure , corrosion resistant etc. there is not a systemic study about color of ZrN coating. Especially about the relation between color of ZrN coating and the craft parameters, Mosts of studies analysis the experiment results qualitatively, not in theory.Mid-Frequency reactive magnetron sputtering is adopted to deposite ZrN layer, and the quality analytical instrument were applied in production, which can measure and control splash process. We have studied how ZrN coating yield color and the relation between color of ZrN coating and the craft parameters.We gains the following conclusion:1. the quality analytical instrument were applied in production, which can measure and control splash process effectively.2. The main absorption mechanism of the present study is the free-carrier absorption, d-d transition of d electron of zirconium is the reason of color of ZrN coating. In electromagnetism theory The color of ZrN coating has a close relation with plasma frequency.3.have established theoretic model of the relation between color of ZrN coating and thecraft parameters, for gaining the relation between color of ZrN coating and the craftparameters.4. according to the method of quadratic-rotation-orthogonal experiment, it is reckonedthat nitrogen partial pressure is the key parameter in craft parameters, and there is aintense interaction of nitrogen partial pressure and sputtering power, sputtering power cancompensate nitrogen partial pressure.5.ZrN coating was prepared under different nitrogen partial pressure, the relation betweencolor of ZrN coating and nitrogen partial pressure was studied. L* value decrease whilecurve of a* , b* value is loop-like with increasing nitrogen partial pressure. Because whennitrogen partial pressure increase, more nitrogen atom can deprive d electron ofzirconium.6.mathematics model is established by binomial- regression, aiming at goal color, wehave practiced controlling the color of ZrN coating using mathematics model.The conclution mentioned hereinbefore showed and explained the relation between color of ZrN coating and the craft parameters, it must be useful for ZrN coating production.