Study On A Kind Of Friction Driving Micro Displacement Working Platform

The micro displacement technology is one of essential technology of the precision machinery and high accuracy instrument. Along with the science and technology progressing, specially in the development of microelectronic technology, the astronavigation industry, the materials science, the bio-engineering and so on, causes the precise processing, the localization technology to an Asian micron time. According to the actual research, this paper has developed one kind of driving micro displacement working platform which using the friction to actuate flexible hinge. The brief introduction on the paper structure is following.1. Discussed the development and the tendency of the micro displacement technology. Introduced each kind of micro displacement principle, the characteristic and its the application, have analyzed the precision including the applicable and its achieved. According to friction wheel driving types , gives the micro displacement working platform by the friction wheel driving the flexible hinge.2. According to the system performance index and the design criterion, have carried on the micro displacement organization system design, dispenses the control section including the machine-building industry bureau. Machine part including platform main body design;Friction wheel drive type and application scope, friction wheel choice of material and friction wheel structural design;The flexible hinge theoretical analysis, proposed the flexible hinge structural model, this structure is one kind of two-stage series symmetrical balance structure,and carries on the statics computation and the finite element analysis to the flexible hinge model.3. Introduced the system control mentality and the correspondence plan, this topic uses new step motor, ASC46MK-H100 is new overtone closed-loop control system of the ORIENTAL MOTOR Corporation, most half step angle of advance for 0.0036°. In view of some characteristics and the control method ,Uses the Mitsubishi PLC controller to realize the micro displacement actuation control.4. Based on the above method and the research results, have developed the system software and the hardware, and carries on the experiment to analyze the confirmation. Basically has achieved the system design goal. Entire micro enters for system travelling schedule 28 u m, pointing accuracy ±0.05 n m.The experimental result indicated the micro translation system is accuracy and feasibility. The system displacement precision has met the system design requirements.