Electromechanical Coupled Dynamics For Electromechanical Integrated Electrostatic Harmonic Micro Drive System

Electromechanical integrated electrostatic harmonic micro drive system isa sort of micro generalized compound drive system. By the harmonicdeformation of flexible ring, the transfer and transform of motion is realized.Dynamics affects working performance of the micro system directly. Studieson it are significant and useful.In this paper, a continuous body dynamic model of the electromechanicalcoupled micro ring under electric field is presented and its dynamic equationsare established, the natural frequencies and vibration modes of the micro ringare investigated. By means of mode superposition method, the dynamicresponse of the system under harmonic force is obtained. Besides it, dynamicequations of electrical system are presented as well. The forced response ofelectric system under harmonic excitation is obtained.The operating principle for the drive system is analyzed. The results showthat static performance and dynamic performance are influenced by phasenumber and pole pair number of the electric field.When nonlinearity of electric field force is considered, by perturbationmethod, nonlinear free vibration, forced response far from natural frequency,near to them and sub-harmonic resonance are discussed.Parametric vibration is discussed when flexible ring is under pull-in state.The length change causes parametric excitation. The ring is simplified ascurved beam with two fixed ends, the natural frequencies and vibration modesare investigated.The solid model of micro ring is given with Pro/ENGINEER software.Static displacement and vibration modes of the electromechanical coupledmicro ring are simulated with Pro/MECHANICA. The simulation results showthat the theory analysis is correct.