Electromechanical Coupled Dynamics For Micro Beam

Dynamic characteristics affect the design and working performance of the electromechanical coupled micro system directly. The micro beam is a typical MEMS structure. In this paper, the dynamics of an electromechanical coupled micro beam is investigated.An electromechanical coupled dynamic model of the single micro beam subjected to electrical field force is presented. The static displacement, the vibration mode function and the natural frequency of the micro beam under electrical field force are analyzed. The forced vibration of the electromechanical coupled micro beam under harmonic excitation is investigated by the mode superposition method. The influence of systematic parameters on resonance is studied.When nonlinearity of electrical field force is considered, nonlinear free vibration, forced vibration near to natural frequency and far from them are discussed by perturbation method. For the forced vibration near to natural frequency, the range-frequency property and its influence factors are studied. The influence of systematic parameters on forced vibration far form natural frequency is investigated too.On the basis of studying the single micro beam, an electromechanical coupled dynamic model of the double micro beam is presented. The static displacement, the vibration modes and the natural frequency are discussed. The forced vibration of the electromechanical coupled double micro beam under harmonic excitation is investigated further.Considering the influence of the air squeezing film, a new fluid -electro-mechanical coupled dynamic model of the single micro beam is built. The displacement response, the electrical field response and the pressure field response are studied by KBM method. Besides, the influence of systematicparameters on above response characteristics is analyzed.The resonance characteristic of the fluid-electro-mechanical coupled single micro beam is studied. The forced vibration equation is presented. When the resonance occurs, the range-frequency property and phase-frequency property are investigated by KBM method. The influence of systematic parameters on resonance is investigated.The solid model of micro beam is given with ANSYS software. The vibration modes of micro beam are simulated. The simulation results show that the theory analysis is correct.