The Accuracy Design And Error Correction Of Nano Coordinate Measuring Machines

Coordinate measuring machines(CMM) is a new type of precision measuring equipment developed in recent three decades. We need more and more higher precision CMM with the development of science and technology, especially with the development of the electronics industry, more and more micro devices appearance. Existing industrial level CMM is too big for these micro devices' measure, and has some shortage. Therefore, the development of small size Nano-CMM is regarded by the world in recent years. But it's difficult to achieve higher measurement precision by improve manufacturing accuracy, and control the environmental conditions. Error correction is an advanced technology that can significantly improve the measurement accuracy of CMM and only need lower costs.This paper analyses the influences of every error source of the precision of CMM. Establish the error model of CMM, and design different method of error calibration for different error source. The reasonable error distributing and design are done according to the given accuracy target and mechanical structures, and guide the structural design of Nano-CMM use the accuracy design. Write a software for error correction of CMM. Finally correct the error of a developing CMM, and get a satisfactory result.