Research On Nano Precision Thermal-Drive Parts System Based On Robust Control

In order to realize nano feeding under large feeding force, according to the research existing state of nano feeding device all over the world and development tendency of this technical in developed country, a nano precision feeding scheme based on thermal deformation is presented, the mathematic modal of nano drive parts based on metal thermal deformation is established and stepped exponential fitting method is presented which can determine the parameters of modal. At the same time, robust control is used to control the nano precision thermal-drive parts system, and the uncertain parameters, external disturbance and time-delay existing in the system is analyzed by experiment. Then, according to two diffident cases, which can be described as when there is disturbance attenuation problem exist in system and there are both of disturbance attenuation problem and time-delay exist in system, two corresponding mathematics modals are established by a great deal of experiment data, two corresponding solutions, which are based on riccati equation, are presented to solve the state feedback controller of the system. Finally, the usefulness and possibility of using robust control to control the system are verified by simulating. Including:Chapter 1, based on the discussing about the two aspects: the development current and key technique of ultra-precision manufacturing; the development and apply of robust control theory. Research content are presented in this chapter, meanwhile, each chapter of this dissertation is arranged.Chapter 2, after introducing ultra-precision manufacturing micro-displacement machines, theories foundation of drive scheme based on thermal deformation, robust control scheme and the design of hardware are introduced.Chapter 3, mathematic modal of drive parts is established by simplifying partial differential equation based on thermal conduction, considering the controlled device have the characteristics of time-delay, uncertain parameters and external disturbance, so the variation ranges of modal are determined through stepped exponential fitting method and a large numbers of experimental findings, and time-delay of system is also researched. Then, combining to robust control theory, two mathematic modals corresponding two...