In the field of accurate measuring and precision finishing etc. ,people have already faced the problem that the instrument and equipment etc. vibrate with micro-breadth themselves which has been the bottleneck of the technique progress. In view of most situations, this vibration doesn't come from equipments themselves. As a result, we construct a platen of vibration isolation which is a kind of effective vibrating suppression. This text is based on a large air spring vibration isolation platen. We develop a new style of active vibration isolation which make up the shortage of the original passive vibration isolation and further improve the performance of the vibration isolation platen. In this article, we analyze the principle, performance and parameters of the six degree of freedoms of the vibration system which is composed of vibration isolation platen and the air spring. And, we also analyze the shortage of passive vibration isolation system, compute the natural frequency of the vibration isolation system.Three degree of freedoms active control algorithm is designed according to the classic PID controller in order to improve the shortage of the passive vibration isolation system in the low frequency area in this article. Through the simulation analysis, the vibrating transmissibility of the vibration isolation system is significant lowered in the low frequency area. The carriage accuracy of the vibration isolation platen is improved and the performance of the vibration isolation is highly improved too.According to the feature of vibration isolation system, referring to the principle of the magnetic suspension, a electromagnetism actuator is designed for the active vibration isolation system application and also a power amplification circuit is designed to adapted to it. We choose other hardware which are needed for the system .In this article, a control system software is designed using digital PID algorithm, which realize real-time control, dynamic display, data record, parameter modulation and malfunction alert etc.A simulation to the active vibration isolation system is carried on using Simulink dynamic simulation module. An active control module is carried on... |