Study On Active Vibration Control Of A Micro-Manufacturing Platform

The research theme of this dissertation is the active vibration control of the micro-manufacturing platform. Combined with the project of National Natural Science Foundation of China—"Research on Theory and Supporting Technology of Bionics Vibration Isolation System for Precision Equipment" (No.50075078), actively absorbed the original thoughts, new theories and technologies of correlative subjects, a 6-degree-of-freedom bionics vibration isolation system of the micro-manufacturing platform and its dynamics model are established, the dynamics, optimization and control as well as some key technologies of the vibration isolation system are studied systematically by combining theoretical analysis, computer simulation with experiment.In chapter 1, the background and significance of the research are introduced, the development trend and the current research situations of the micro-manufacturing vibration isolation platform and active vibration control technology are expatiated, and the study contents of this dissertation are proposed.In chapter 2, based on the bionics of the woodpecker's brain vibration isolation mechanism, a 6-degree-of-freedom bionics vibration isolation system of the micro-manufacturing platform and its dynamics model are established. The vibration transmissibility of the vibration isolation system under complex vibration environment with the floor disturbance and the direct disturbance is defined and studied. The dynamics model of air springs is analyzed. The modal testing of vibration isolation system of the micro-manufacturing platform is made.In chapter 3, aiming at the disturbance over wide frequency area, the integral of the vibration transmissibility in the range of frequency for the active vibration control is used as optimization object function, and genetic algorithm is used to optimize the feedback parameters of the active vibration control system. Based on the controllability and observability of the control system, the optimization of sensor and actuator placement is studied. The dynamic characteristics of the two-layer vibration isolation system for the micro-manufacturing platform under the different installation way of the actuator and complex vibration environment with the floor disturbance and the direct disturbance are studied, and the influencing relationships between the active force of actuator and the parameters of passive isolator are analyzed.In chapter 4, after analyzing the characteristics of the giant magnetostrictive material, the giant magnetostritive actuators used in the active vibration control of the micro-manufacturing platform are developed. The static state and dynamic characteristics of the giant magnetostrictive actuators are measured and analyzed, and the characteristic model of the giant magnetostrictive actuators is established.In chapter 5, PID control, LQG control, H_∞ control, fuzzy control and neural network control are used in the vibration control of the micro-manufacturing platform. The performance of the vibration control for different type of disturbance as well as disturbance in different frequency area are analyzed and compared by computer simulation. The simulation results show that the performance for the vibration control in state of fuzzy control or neural network control mode is obvious better then that in state of PID control or LQG control or H_∞ control mode.In chapter 6, based on the analysis of generalized predictive control approach, an improved adaptive generalized predictive control approach is put forward. Being this improved control approach makes full use of the history and current information of the control signals, the control...