Testing And Analyzing On Characteristic Of PZT

With the development of the Science and technology, PZT has become the applied very extensively tiny motion machine currently because of minuteness, quickly responding and precision. The higher level has been requested in the fields of aviation and optical engineering etc. As the core of interfere technology, PZT have been more important than before. There are non-linearity that the relation between electric field and PZT displacement, creep and hysteresis phenomenon because of the difference of the structure and the complexity of work- principle.Optical interferometry is one of accurate and high resolving power measure methods. It is provided with non-contact, high accuracy and high efficiency. However, the phase measurement technique decides the accuracy of optical interferometry. So, phase measurement technique, which greatly improved the accuracy of optical interferometry, appeared and developed in 1980s. With the data obtained in the testing field at the same time, the optical phase of full field-testing is realized in deed associated with this technique. The most common way to vary the phase is to apply phase modulation. The phase-shifter is the key component, whose accuracy directly affects the accuracy of phase measurement. Today, PZT is the most popular phase-shifting device. Therefore the testing of phase-shifter characteristic is very important for the phase measurement.The phase-shifting system is making up of LabVIEW and PCI-1200DAQ. It drives the PZT phase-shifter uninterruptedly and makes interferograms move holistically. And record the variety of immovable-dot intensity; change the rule of intensity variety into PZT displacement. This system does not need complex circuits with strong test resolving power, big test dynamic range. And only deal with one-dimension signal, so greatly reduce the compute quantum. So it can test the whole range in a short notice.Firstly, detailed introduce the characteristic of PZT in the work mechanism, and describe the reason of the characteristic. Testing the displacement-voltage curves of PZT is based on the interferential theory. Research the rule of repeatability, linearity and the displacement of PZT in conditions that voltage distance for 0.20v～0.50v and interval for 10ms～90ms. The results indicate that the displacement-voltage curve is divided up into three parts:0-200v and 280-300v is the nonlinear region, 200-280v is the linear region, when the voltage is increased. And the curve is divided up into three parts: 300-230v and 150-Ov are the nonlinear region, and 230-150v is the linear region, when the voltage is decreasing. This paper mainly research the characteristic curves when the driver voltage range is in 206-222v. The average standard deviation between the curve of displacement over voltage change and the fit line achieve 0.002795μm, when the interval is 10ms, the voltage distance is 0.3v and the voltage range is in 206-222v. PZT cannot come back to the steady state until waiting for 6-8 minutes. And gain the PZT displacement characteristic curves in different intervals and driver voltage distance. Fitting the curves based on least-square in a certain linear region, and discussing the different driver parameters influence the linear degree. Providing scientific foundation for precise use PZT in future experiments.