Study On The Preparation And Properties Of TiC Thin Films Deposited By The Multi-Arc Techniques

Since the 70's, the surface engineering has been progressed rapidly, which has not only obtained substantial achievement in academic but also in the practical applications. Ion plating technique is one of the most advanced and widely used surface treatment techniques at present. The Multi-arc ion plating technique is the most outstanding one. This study prepared TiC thin films on the high speed steel by multi-arc ion plating technique and has conducted a system research on the preparation and properties.The first part of this paper has mainly studied the effect of factors on the micro-hardness and the adhesion strength, such as C2H2 flow rate, target power, bias voltage, deposition temperature and so on.The best parameters have obtained. Conclusions : C2H2 flow rate is 0.20L/min; deposition temperature is 300℃; Ar flow rate is 0.02L/min; target power choose as 60A; deposition time is 60min and bias voltage is 250V. When the TiC coatings prepared under these parameters its micro-hardness achieves 2900HV0.05, the adhesion strength is 50N and the depth is about 5μm.The second part of this paper has mainly studied the wear resistance of TiC coatings and determined its internal stress. The wear resistance test indicated that, the TiC thin films have smaller friction coefficient and more outstanding wear resistance than the TiN coatings. The stress test results indicated that, the total stress, thermal stress and internal stress are all compressive stress. The compressive stress enables the materials to have the stronger anti-destructive capability compared to the materials free of stress.