The Design And Fabrication Of Intensity-Modulation Fiber Optical Accelerator Based On Silicon

A key research direction of Micro-electro-mechanical systems(MEMS)is Micro-opto-electro-mechanical systems (MOEMS),which blend MEMS and optical devices into one whole system。MOEMS integrate micro-opto-devices and micro-electro-devices and micro-machine into the commonly compatible materials,and exert their synthesis capabilities。Therefore,it can not only make the system minimize,as to reduce the fabrication cost of devices,but also realize the self-aligned between the optical devices。The appearance of MOEMS has accelerated the development of optic communication and space flight techniqueIn this paper, some typical optical switch accelerator are introduced based on Micro-electronics-mechanical system . Different applications and recent progress of various switching technologies are discussed.At the same time,we designed a new kind of Intensity-Modulation Fiber Optical Accelerator Based on (110)Silicon, the design, fabrication, packaging and performance testing capability are presented.Inspired by the past research in MOMES Switches, this paper proposes a project of optical accelerator based on the anisotropy fabricating technique of silicon. The measurable object will have different max-displacements with different acceleration. At the same time, the micro-mirror, fabricated on the surface of the mass, is located on the optical path. Therefore, the luminous flux received by another fiber will be different. As a result, the acceleration can be computed.In the design of the accelerator, this paper makes use of mechanic to do some theory research. Through the comparing torsion beam and cantilever beam, this paper chooses the latter for the configuration in the end. This paper analyses the corrosion character of (110) silicon to adopts the proposal of make fiber U-grooves. Under strict control of crystal direction, the fiber groove makes an angle of 70.53 degrees with the mass. This paper also considers the compensation of corrosion of (110) silicon, and try to explore the reason.In the optimization design, this paper use finite element method tool to find the relation between the structure and the max displacement. This paper first proposes some finite element theory. Based on these, through computer, this paper gets the relation of max displacement with the beam width, with the beam position, with the length of another mass and with the beam thickness. After the parameters are confirmed, this paper perform modal analysis for studying the movement of the accelerator, which is the foundation for the further research work on the micro-accelerator. At last, this paper simulates the performance of the accelerator.In the experiment, this paper explores the technology condition of fabricating optical fiber accelerator based on (110) silicon. First, through fan position method, two (111) crystal faces at the angle of 70.53degrees are confirmed on (110) silicon. After that, through the anisotropy corrosion processes, the reaction ion etching processes and ICP process, this paper fabricates the inertia component and fiber groove. At the end, the theory of corrosion compensation is validated.