| Micro-job has attracted attention of more and more researchers as a new-style job due to the rapid development of nanotechnology. As the tip of the micro-job system, micro-manipulator is the bridge between macro-devices and micro-objects. And the performance of micro-manipulator is the key if micro-job task wants to be actualized successfully. To develop the micromanipulator which meet the requirement, the key technologies which include: drive technologies, implement organ, detecting sensor and control method, is studied in this thesis.Based on the amplificatory principle of flexible organ, the structure form which is piezoelectric ceramics driver pulsing flexible organ is adopted to design the implement organ of micro-manipulator. Numerical steady DC power supply and eddy current transducer are applied to carry out the function of orientation & detecting. On the foundation of the work, the organ is fabricated and tested as well as optimized. Design work is assisted with theoretical parameter optimizing and FEM.Because of the complicated actuating mechanism of piezoelectric ceramics, the accurate analytical model of piezoelectric ceramics is difficult for modeling. In order to automatically realize high precision orientation, the compound control strategy is adopted based on the principle of correlative control strategy. After that, program is programmed and debugged on the foundation of the designed hardware.At last, it shows that the developed implement organ can improve the inconsistent of large room & high precision effectively, and the structure of the organ is compact with long tip which is convenient for micro-job. Furthermore, the control program based on the correlative control strategy can achieve the function of orientation fast and truly, which makes good sense for high precision.This thesis provides technical and practical experience for the further research of micromanipulator as reference, and is helpful to promote the technology of micromanipulation based on micro-job.
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