Research On Piezoelectric Micro-Angle Actuator Combined With Flexure Hinge And Closed Loop Control

With the rapid development of science and technology, continuously improved product, to the parts processing precision requirements are increasingly high, precision processing and ultra-precision processing technology has become the research hotspot of manufacturing technology and one of important development direction. Based on the micro displacement driving positioning system resolution, positioning accuracy and repeated in nanoscale properties, are widely used in precision measurement, precision processing and assembly, nano science instruments, biological cell manipulation and semiconductor equipment and other fields.Novel piezoelectric micro angle drive to push - pull movement of piezoelectric ceramic as the basis,using the new mechanical processing of materials and the combination of flexure hinge mechanism was designed. using high carbon chromium bearing steel GCr15 as processing material of piezoelectric micro angle drive can solve the short service life caused by the mechanical friction, as well as by resolution and repeatability positioning accuracy caused by air corrosion and other defects.Application of flexible hinge structure for piezoelectric ceramic with preload and expand output angular displacement, according to the flexible hinge design parameters can be calculated by the hinge stiffness, angle and stress parameters. Application in the control system of TMS320LF2407 type digital signal processor (DSP ), based on original open-loop control system improved closed-loop control system, In the digital signal processor (DSP) controller in the preparation of proportional-integral-differential (PID) control procedures, can realize the quick and accurate positioning of target displacement, obviously improves the positioning accuracy and the stability of the system. Integrated in the linkage plate circular grating can be detected in real time by the actual output displacement, and the detecting result is feedback to digital signal processor (DSP) with closed loop control.Built the whole system platform.,base on the driving control and detection system to carry on the experiment, the experimental results show that the whole system has high single step positioning accuracy(better than 99.3%), repeat positioning accuracy (99.5%)and single step stability(better than 99.5%), the experimental results of ideal.