Research Of Detecting & Controlling Circuit Of Micro-Fluidic Gyroscope

Over the past decades, Micro-Electro-Mechanical-System (MEMS) has emerged with the development of the IC technology. Micro Inertial Measurement Unit (MIMU) is an important application area. The configuration of the sensor consists of a small silicon etched cavity, a suspended central heater and four suspended thermistor wires, all of which are assembled and packaged in a hermetic chamber. Micro-fluid gyroscope, with the merits of small volume, low mass, high reliability, is a kenneled device of the MIMU.This paper presents research of the circuit scheme of a micro-fluidic gyroscope. The details of the thesis are as following:1. The operating principle of the Micro-fluidic gyroscope was analyzed and was validated with the simulation results. The aspects relative to the sensitivity of the gyroscope were demonstrated.2. The measuring circuit of the gyroscope was designed. In order to improve the precision of the gyroscope, the model of a constant temperature circuit was presented and simulated.3. The tests of several different micro-fluidic gyroscopes were carried out and the results indicated that the circuits of the test and the constant temperature were feasible.