Research On New Two-coordinate Worktable Of Nano-CMM

Many types of three dimensional mechanisms (3D-mechanism) are used in modern industry. Specially, in precise manufacture inspection, coordinate measuring machines (CMM) play the key role. With the improvement of MEMS, the measurement of micro accessories needs nanometer-level accuracy, and conventional coordinate measuring machine can't meet the measuring demand of tiny accessories, so Nano-CMM becomes research hotspot in the world.This paper studies a kind of two-coordinate worktable which is the important part of a new nano-CMM(three-coordinate measuring machine). For the demand of driving slowly without creep and nanometer-level accuracy, a kind of magnetic suspension rail with excellent capability is designed. "The same plane" oriented mode is quoted with the capability of almost zero Abbe error. The author improves the structure designs of force balance and isolation of heat and vibration during the design of two-coordinate worktable. The results are as follows: Creep is solved when worktable is driven slowly. Mini-movement is realized. The results meet the demands of nano-worktable.