Development Of MEMS Capacitance Sensor Based On Pressure Artificial Denture

Using the removable dentures to repair the bad natural teeth, the health of the patient is impacted by the force of oral below in the dental clinic. Therefore, the oral medicine researchers hope to accurately understand the oral beneath the force of dentures. At present, according to the document retrieval, there are only few the relevant research reports in china mainland while the foreign researchers has made some progress in the field. The denture is still relatively difficult to accurately measure the force of oral below because of the restriction of the sensor.According to MEMS technique and the principle of the capacity pressure sensor, a new type sensor is presented in this paper, which adapts to test the pressure of artificial denture. This sensor is designed by MEMS technology of lithography, oxidation, mask, bonding processes and is a novel sensor in view of pressure testing in clinical medicine. The primary works in this thesis are listed as follow:The work principle of the MEMS capacitive pressure sensor is analyzed. The shape of the membrane options and the deflection of the analysis of the p+-Si diaphragm have been finished. The simulation using ANSYS was made. The overall structure and the sensor size are designed. Therefore, the sensor is small and simple. The overall structure of the sensor size is only 2.2mm×1.8mm×0.6mm of the length, width and height and then the sensor is fit for pressure measurement to implant dentures.The key parts of the sensor's production process involved in the MEMS technology are explored in both theoretical and practical aspects. Fortunately, we can get the P+-Si diaphragm with the controllable thickness and the good mechanics character. The problem of the forming of an electrode on the glass was solved.According to the structure and size of the sensor, we design the necessary lithography mask design map, and produce a corresponding lithography mask of the MEMS capacitive pressure sensor.The process of the silicon sensor technology, glass technology and silica-glass bonding of the sensor is designed. The production of the sensor has been completed, and we cumulated a set of standards process for the sensor technology.The CAV414 chip is applied to the production of test circuit. A faint signal capacitance measurement circuit and the preliminary testing of the sensor have been finished. The test results showed that the sensor had good and stable relations between the input and output. The changes to the external pressure can be accurately measured.In the dental clinic, implant denture can be buried sensors distributed. The force and its distribution beneath the bottom of mucosa and submucosa of the bone tissue exposure can be accurately measured.