Modeling And Simulation Of MEMS Optical Switch

With the development of Internet, the traditional mechanical optical switches can notsatisfy the development of high-speed, large capacity optical transportation net,which proposese a higher requirement to transporting-speed and bandwidth. The new micro-mechanical optical switch, with its characteristics of small size, easy integration, the physical parameters of wavelength, refractive index, temperature , based on MEMS become the mainstream of large capacity exchange optical net switch.The comb-drive optical switch is studied in this dissertation. This paper states the working principal of comb-drive switch. By choosing the displacement of the micromirror as the generalized coordinate of the optical switch, calculating kinetic energy, the potential energy, the magnetic energy and the electrical energy of the system, the Lagrange function is constructed. On the diffusion function determined, the electromechanical dynamics equation of the system is established. Make the simulation by Matlab, obtaining dynamic response process of the system under the step voltage. On the impact of micro-mirror displacement and the response time of the qualitative analysis of the factors, drive voltage and nickel beam's size are the key factors in switching performance. The effect of the capacitance edge on the system cannot be neglected. And the capacitance edge effects play an important part in increasing the micro-mirror's displacement. To enhance the velocity of response, the optimization design to the system is carried on.The quality of the nickel beam is taken for the objective function. The nickel beam's length and breadth high is thought as design variable. The optimization model is established. The solution is carried on by the genetic algorithm optimization method. The stable state displacement increases by 14% under the same step voltage, and the adjusting time reduced by 6.5%.