Development Of NMM Probe Based On Fizeau Interferometer

As the development of nanotechnology and MEMS(Micro-electronic mechanical engineering) technology , tiny objects need to be handled or assembled. The scanning probe technology, which appears as Scanning Tunnel Microscope (STM) and Atom Force Microscope(AFM) meets the need above. However, of the PZT scanner used in SPM limits the scanning range, so the scanning probe technology can not be used in large scale measurement. The Nano-Measuring Machine which realizes displacement and positioning with wide range and high precision becomes necessary in micro/nano measurement and metrology.The Nano-CMM is composed of positioning platform and probe, and realizes different mode of measurement by mounting different type of probes. In this dissertation, compared with the exist SIS probe, a probe based on Fizeau interferometer is developed by using of a new type of Nano Positioning and Nano Measuring Machine (NMM) platform. Signal collection and processing circuit has been designed and tested according to the requirements of the probe.The main content of this dissertation include:(1) The mechanical parts design of the probe including selection of PZT, microcantilever and probe holder design.(2) Light path design including selection of laser source, fiber and light splitting mirror; signal analysis and computation between mirocantilever displacement and light signal change.(3) Select photoelectrical conversion, design signal processing circuit and debug, show result on computer.(4) Analyze characteristic of interferometer by measuring the length of PZT, so that know the accuracy of probe.