| With the development of mechatronis technology and fault diagnosis theory, people regard flow information much more than before. Cheap, fast and accurate enough flow sensors are urgently needed by hydraulic industry. So MEMS sensor, which is small, low cost, well performed and easy to integrate, will surely play an important role in this field.Based on the new method of flow measurement which was put forward by our research group, this paper completed the preliminary measurement of flow rate in hydraulic system by setting up the mathematical model, using numerical simulation method and doing physical experiment. The specific work is as follows:Firstly, the paper generalized MEMS technology and its impact on industry .As we founded piezoresistive sensor is fine for hydraulic system, we studied the mechanism and technical parameters of them and selected one that applied to our research.Secondly, based on viscous fluid flow equations we deduced differential pressure-velocity model of this new sensor and did optimization on parameters. Then, we designed and manufactured the throttle and studied the velocity and pressure field inside the sensor by FLUENT.Also in simulation we get the differential pressure-velocity curve .The model machine was simulated too to direct experiments.Finally, in the static experiments we calibrated the MEMS sensing element and made some sample sensors. Then in a hydraulic testing system we compared the sensor signal with a turbine meter. It presented good linearity and could meet general hydraulic system use. Based on the CFD curves, we analyzed the error reasons and made some suggestions to improve. The model machine was also simulated .It is a long journey for a new sensor from being born to being used in application. There is still more space on the research of principles, modeling and parameters optimization. We will also pay lot of time on substantial experiments for the wide spread of this new sensor.
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