The Research On A Subminiature Power For PZT Supply With Low Output Ripple

Piezoelectric actuator have been widely used in many fields such as micro- electronic, micro-mechanism, nanometer-science and technology and so on. Nano- table is the important part of nano-CMM(three-coordinate measuring machine), and that the piezoelectric actuator's application is the key component in nano- table.PZT driving's orientation needs nanometer-level accuracy, while the power supply's quality has big influence on Piezoelectric actuators. So people attach more importance to the research of high precision driving supply power.The research is based on the project sponsored by the National Natural Science Foundation of "Nano-CMM key technology research" (50175024) and National Natural Science Foundation of major international cooperation project "Nano three-dimensional measurement system key technology research" (50420120134). This paper studies a kind of high precision supply power for eight PZT actuators which are center part of 6-DOF micro-table. For the demand of multichannel power , low output ripple, low price and integration for PZT, the paper develops a eight - channel micromation power for PZT supply with low output ripple. When designed, the operational amplifier is used as the amplifier circuit of power supply to replace the separate component. By testing, the eight-channel power supply's ripple is less than 15mv, the resolving power is 6mV, the displacement resolving power is 0.8nm,the nonlinear error is less than 0.1%,the continuous output current could be 0-1A, and the voltage of time excursionn is less than 6mv after 8 hours'continuous working. The power bandwidth could be 2kHz. The power supply has the characteristics of strongly driving capability,fine stabling, subminiature , fine practicability and cheap price etc,so it could satisfy the requirements for nano meaurement.