Design Method For Plane Bending Actuators Of Dielectric Elastomers

As the core actuation component, the micro actuator has been the MEMS research hot spot and the breakthrough point in MEMS research, and becomes an important symbol of the develop-level in MEMS research to a certain extent. The dielectric elastomer is a kind of membranous insulating plastics in electro-active polymers. It is soft, resilient, light, similar to animal's muscle. Specially it will have a large scale strain under the direct-current field, its strain rate will be bigger than traditional electrostriction material such as piezoelectric ceramics, and has a high driving efficiency, a good vibration-proof mobility. This caused the possibility, this kind of material to be taken as basic materials for actuators in MEMS. This material has the great potential, to be used as actuation component in biological and micro machinery.The uniplanar bending actuating unit designed in this paper is a kind of device which can transform directly the electrical energy into the uniplanar bending movement. This paper explained the working principle of roll-type plane bending actuator of dielectric elastomer; presented a structural plan for it, established its mechanical model, derived a set of calculating and design formulas, especially the calculating formulas for lateral stiffness and corresponding deformations of coiled spring. The results of numerical simulation showed that, such an actuator can performed as well as expected. All the parts of the uniplanar bending actuating unit were designed and manufactured. Although the prototype experiment was failed with some reasons, it still provided the design theory and method, the structural plan, and the practical experience in manufacturing for the design and application of such kind actuators.