| Micromachined gyroscopes processed by MEMS technology have a variety of applications in many fields due to their small size, light weight and low cost. Capacitive micromachined gyroscope is the emphases of actual sensor research. By researching and analysis the development of micromachined gyroscopes of home and abroad, an electrostatic comber droved, capacitive detection of bar structure, decoupled designed micromachined gyroscope is present in this thesis. Slide-film damping is the main air damping of the structure, it possible to achieve high Q-values at atmospheric pressure.Fundamentals and dynamic characteristics of micromachined gyroscope were analyses, and electrostatic drive principle, capacitive detection principle and the air damping were discussed in this thesis. The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis. On the basis of this, operating frequencies, damping, Q-values, sensitivity of the gyroscope were discussed. Process flow and territory were designed due to the process condition. Besides, the packaging of gyroscope was analyses simply.Considering the effects of error and residual stress on the performance of structure, several errors were analyses, including orthogonal error, mechanical coupling, and the interference from axial accelerations, noise and temperature. Besides, some methods of reducing error were advanced. The generating and impact of residual stress of structure was analyses. Structure release pore which can reduce the residual stress was adopted in the design of structure. The residual stress of the structure was tested by Raman scatter spectrometer. The drive and detect circuit were designed according to working of capacitive micromachined gyroscope. At least, the structure was tested elementary. The measured resonant frequency is 2.66kHz for driving mode, and the sensitivity is 0.0279 V/°/s.
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