Research On Capacitive Micro-machined Gyroscope

Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays. Additional, capacitive micromachined gyroscope is the emphases of actual sensor research.This dissertation uses micro capacitive micro gyroscopes as the research target, focusing on its technology characteristic, from the three aspects including structure design, circuit design and technology processing, gives the introduction and research.Firstly, development and the fundamental of micromachined gyroscope theory is introduced, and focused on the structure of the micromachined gyroscope; the electrostatic drive principle and the capacitive detection principle are discussed in the dissertation.Next, the dynamic characteristics of the micromachined gyroscope are analyzed, and finite element analysis software is used to simulate the micromachined gyroscope. The effect of primary structure dimensions on nature frequency of micro-machined gyroscope is studied by finite element analysis software-ANSYS. According to matching of driving mode frequency and detection mode frequency, the structure dimensions are optimized.Then, in connection with the advanced MEMS processing technology, from the aspect of processing, describe the micro-gyroscope in the processing involved in the process to the main MEMS technology, the processing processes and the technology research. MEMS gyroscope package designed to process the general flow. MEMS gyroscope as a production core content, the success of chip design and processing has very important significance.The last part is the test of the bare chips of the micromachined gyroscope which is based on the design and processes of the previous chapters, including the qualification test and the performance test. Analyze if the product is consistent with the theory, verified the rationality and the feasibility of the micromachined gyroscope's design scheme.