The Surface High Temperature Measurement Technology Based On MEMS Thermopile Sensor

HTransient temperatureH can hardly be measured using the traditional thermocouple as it is toohigh or the acting time is too short.Based on the HmicroelectronicsH technology and theHsemiconductor technologyH, MEMS Hthermopile sensorH which is a non-contact temperaturemeasuring device, using the Hinfrared radiationH as its mechanism, is not needed to contact themeasured objects and can effectively eliminate the errors of temperature field caused by theinstallation of the sensor to achieve non-contact temperature measurement; at the same time,as the micro temperature fluctuation of the object can cause a great change in radiation energy,the sensitivity of the Hinfrared radiation thermometersH is high.Therefore, the research oftransient surface high temperature measurement is available using MEMS thermopile sensor.Based on the Hinfrared radiation temperature measurementH, this paper Hspreads out expositionHaround the system of surface high temperature measurement using MEMS thermopile sensorand explores it in the aspects of Htheoretical designH and key part Hperformance analysisH.This paper firstly analyzes the Hcurrent research statusH of Htransient temperature testH andintroduces the structure, nowaday development and application of the Hthermopile sensorH.Then, aiming at the temperature measuring actuality, a new method of high temperaturemeasurement is proposed using MEMS thermopile sensor and the system of transient (msscale) surface high temperature (1500℃--3000℃) measurement based on MEMS thermopileis designed, the function of various parts of the system and the selection of the material.arediscussed further;at one time, the static and dynamic calibration method of the system aresuggested and provide a theoretical basis to further the investigation.In addition, researchingon the infrared Habsorption coefficientH of key organ of the system--the ceramic material attenuation slice, typical FTIS measurement was discussed,and combination the characteristics ofhigh-temperature test system,a new measurement method—MEMS thermopile measurement wasproposed。The two methods verify each other and the test results show that MEMS thermopilemeasurement has a simpler and more accurate advantage, which gives a good basis for thesystem to achieve.At last, 4.5mm,5.5mm ZrOB2 Bceramic thin slices are manufactured in theway of molding before sintering and its absorption coefficient is being experimented. The testresults show that it has a good performance which can be using in the system of MEMSthermopile surface high temperature measurement and make a basis of furthering theimprovement of the system.