Design And Analysis Of A New 3-RRRRR Parallel Micromanipulator

With the development of science and technology, more and more people are paying attention on micromanipulator. As it has wildly application prospect and huge developing potential, so it is very important to design a new micromanipulator which can satisfy special request.In this paper, based on 3-RRRRR parallel mechanism, a new micromanipulator which is driven by piezoelectric ceramic actuator is designed and analyzed. The detail are as follows:A 3-DOF 3-RRRRR parallel mechanism is chosen as basic mechanism. According to thought that kinematic pairs of rigid mechanism is substituted by flexure ones to achieve micro movement, firstly, flexure revolute pairs which is the basic factor element constituting 3-RRRRR parallel micromanipulator is designed, then, combining different pose of 3-RRRRR parallel mechanism, four configurations of flexure mechanism are designed, finally, choose the one meeting the requirement of Degree of Freedom and accuracy.As research basis of 3-RRRRR micromanipulator, its inverse displacement is analyzed. Fully considering the characteristic of manipulator, using D-H method, by abstracting and simplifying, get the inverse displacement of 3-RRRRR micromanipulator,and establish foundation for its accuracy analysis.Micro movement of the micromanipulator is implemented by deformation of material and its compulsory coupling forced by driving forces.Considering strength, stiffness, deformation compulsory coupling and motion characteristics of micromanipulator, do the static analysis by using analysis method of internal force of material mechanics, and get the carrying capacity, by sofeware measurement, then, get its workspace and the relation between input force and output displacement, and establish foundation for controlling the micromanipulator. Based on the inverse displacement analysis,and considering all kinds of error sources, analyze the generalized geometric error of 3-RRRRR micromanipulator, and has certain guiding significance for the designing and manufacturing of the manipulator.Considering the statics, error and the working principle of piezoelectric actuator, according the relation between input force and output displacement, preliminarily design the control system of 3-RRRRR micromanipulator.