| Optical emission spectrometer is a species of analysis instrument that used for analysing the composition of material. According to excitation sources, spectrometers can be divided into spark spectrometer, inductively coupled plasma(ICP) spectrometer, glow discharge plasma spectrometer and so on. Because of a great many merits, the ICP spectrometer becamed one of the most important spectrometers. In some special conditions, the reduction of spectrometer's volume is more important than the improvement of spectrometer's wavelength resolution. Spectrometer miniaturization has become a hot research in analysis instrument field. Nowadays the research reports are seldom found, excitation sources miniaturization restricts the research process of spectrometer miniaturization. So investigating steady dependable performance of ICP source has important application prospect.The status and trend of Micro ICP source are described briefly. Gain the result that three-dimensional spiral-shaped coil electromagnetic energy is stronger than that of planar coil by theory analysis. The ICP source based on 24 kinds of the three-dimensional spiral-shaped coil are designed. Test the infuluence of Ar pressure (50Pa-250Pa), coil'turns and diameter on the mICP source's igniting /sustaining power by full-scale experiment method. Found the most optimal parameters of mICP source in these parameters by orthogonal experiment method.When the frequency is 13.56MHz and the Ar pressure is from 50Pa to 250Pa, the ICP source based on 24 kinds of the three-dimensional coil can be ignited. The parameter optimization is that the coil has 4.5 turns, the diameter is 5mm, the lead diameter is lmm, the lead diameter is lmm, and Ar pressure is 100Pa, the mICP source can be ignited and maintained easily most. At that time, the ignited power is 3.8W, the maintained power is 0.5W. The working power is less than that of mICP source based on planar coil.
|
PDF Full Text Request