Excitation Performance Investigation Of Micro-Stereoscopic Spiral Coil ICP Excitation Source

As an important component of atomic emission spectroscopy instruments,the excitation source has an irreplaceable role in component detection.It has a glow discharge excitation source,an inductively coupled plasma(ICP)excitation source,a microwave plasma excitation source,and the like.The type,in which the ICP excitation source has become a common excitation source because of its strong excitation ability and strong anti-interference ability.At present,spectrometer miniaturization has become an important research direction in the field of analytical instruments.The research on the miniaturization of excitation sources is very important.However,there are few reports on micro-excitation sources,especially micro-ICP excitation sources.Therefore,the research on micro-ICP excitation sources is studied.And exploration has important value and significance.In the early stage,the research team only explored the ignition power and maintenance power of the ICP excitation source of the micro-stereoscopic spiral coil with copper material.In order to get better excitation performance,this paper will continue to select the stereoscopic spiral coil of the excitation source as the research object.Through the experimental platform of excitation gas and acquisition spectrum,the excitation performance of the excitation source will be further explored.The main work of this paper is as follows:(1)In the course of the experiment,the CCD spectrum detection system was used to collect the spectrum,and the fixture was designed and installed with the collimator lens.The experimental data before and after the installation of the fixture were compared.The results show that the stability of the data obtained by the experiment is improved.(2)According to the design scheme of the microstructured stereoscopic spiral coil,tweenty-four kinds of stereoscopic spiral coils with different structural parameters were fabricated by using copper wire and silver wire respectively.The comprehensive test method was used to compare the excitation effects of stereoscopic spiral coils with different structural parameters,and the optimal combination of structural parameters when the stereoscopic spiral coil excites argon was found.The excitation effects of the copper spiral coil and the silver spiral coil were compared.(3)Analyze the influence of RF power and working pressure on the spectral intensity of argon plasma,and obtain the ideal working conditions when the excitation source is excited by argon: the RF power range is 18~22 W,and the working pressure range is 60-100 Pa.(4)The precision experiment of the micro-stereoscopic spiral coil ICP excitation source was completed.The spectral intensity of the argon line with a wavelength of 772.42 nm was observed experimentally.The relative standard deviation(RSD)value of the excitation source was calculated to be 2.3%.(5)Excitation of the air sample detected atomic and ion lines of five elements of nitrogen,oxygen,carbon,helium and neon,indicating that the micro-stereo spiral coil ICP excitation source has the ability to excite air samples.