Modeling And Optimization Of MEMS Optical Switch With Torsion Beam Structure

The traditional Mechanical Optical Switch is slow in speed, bulkyin scale, not easyto integrated on a large scale and difficult to adapt to the transmission requirements ofoptical conveyance network, which limits its application in the field of opticalcommunication in the future. The new Micro Mechanical Optical Switch based on theMEMS will becomethemainstream directionof development in convertingtheopticalnetworkswitchinhighcapacity.The thesis introduces working principles of Optical Switch, analyzes motionprocesses of electrostatic driven MEMS optical switch with torsion beam structure,usesLagrange'sequationsofmotiontoestablishthemathematicalmodel.Italsomakesmodal analysis to the optical switch with torsion beam structure with two methods ofequation analysis and finite element analysis, which verifies the correctness of themathematical model. Based on it, we can conclude that various structural parametershave effect on the performance of electrostatic driven MEMS optical switch withtorsion beam structure by MATLAB simulating calculation analysis, providingtheoretical basis for upgrading its performance. Finally, the study optimizes theelectrostaticdrivenMEMSopticalswitchwithtorsionbeamstructurecomprehensively,improvingitsworkingperformancebetter.