| As for the environmental protection, the renewable clean energy strengthened the large market demand, and the development of solar energy utilization technology has a broad prospect. There are wide fields of solar energy using, but now the main way is through the solar solar which convert solar energy into electricity power. The solar cell is a feasible method for solar radiation using, it can obtain higher photoelectric conversion efficiency with its cost reduced to a certain extent. The application area expand to meet the daily application requirements from only use in space technology by military. But we should also see that because of the solar energy utilization technology is not perfect, the solar energy conversion efficiency is relatively low, therefore, how to effectively improve solar photoelectric conversion efficiency of solar cells become an increasingly urgent problems.Based on the development and utilization of solar cells were briefly reviewed in this paper, we analyzed the advantages and prospect of cells power, discussed how to improve the efficiency of solar cells, the objectives of the study and implementation was put forward. The main conversion efficiency of solar cell factors such as stray resistance, diffusion length and compound rate were analyzed,too.The solar cell simulation software AMPS and PC-1D were introduced in this paper. We pick up the PC-1D to introduce its properties and setting principles, and gives a brief explanation of how to use this software to simulate the efficiency of solar cells analysis. By consideration of each factor which influences the efficiency of solar cells, the factors affecting the conversion efficiency were analyzed after familiar with the PC-ID using method, and verified the influence by those factors who change the conversion efficiency of solar cells. Through simulation optimization, we obtained the high efficiency of conversion solar cell parameters of polycrystalline silicon thin film solar cells, this scheme realized 0.7818's fill factor,15.82%'s photoelectric conversion efficiency of solar cell design, completed fill factor of 0.75, photoelectric conversion efficiency of 15%'s solar cell design target.Finally, based on the simulated cell parameters, we designed a new SSP polycrystalline silicon thin film solar cell, and the specific process of the implementation process were discussed. Firstly,we use zone melting recrystallization method to obtain the SSP substrate with good crystalline quality and surface roughness. Then through lithography the substrate surface's SiO2 layer(phosphorus diffusion layer) and use the PECVD process through the layer of sintered aluminum paste to form a back electric field. Then use of rapid thermal chemical vapor deposition process for polysilicon thin film deposition, using lower cost technology of battery acid etching to wool the surface of silicon chip and PECVD technology to form SiNx material antireflective coating layer. Finally, evaporate and sinter layers to form electrode, trim the edge of the chip to complete the battery manufacture. Through the control of process parameter we got the silion chip which can match the structure designed. |