Study On Parallel Detection Related Technology Based On Piezoelectric Micro-cantilevers Array

The principle of scanning probe microscope(SPM) is to detect the surface topography or other surface properties of sample by use elastic micro-cantilever whose one end is fixed and other end is loaded with probe. This system has high resolution ratio, and is easily operated, so it is widely used at the field of material study, defect analysis, Evaluation of film-forming conditions and Quality Control. It established the dominant position of micro-cantilever at the area of surface properties study and small detection. SPM with single probe which we use now has small detection area, low scanning speed and low detection efficiency, so that it is hard to satisfy the requirement of detection range and efficiency which enhanced with the development of MEMS nowadays. So the parallel multi-probe detection system is an irresistible trend of SPM's development.In the development of parallel SPM which based on PZT thin film piezoelectric micro-cantilevers array, this paper accomplished study of thin film's size effect, design of related circuits, detection of micro-cantilevers'performance, System integration test and investigation of Parallel imaging technologies.When investigating the thin film's size effect, firstly, analyze the method to enhance micro-cantilever's detection sensitivity, thus, put the study of PZT ultra-thin film forward. Fabricated PZT thin films whose thickness is between 140nm and 440nm by sol-gel method on Pt/Ti/SiO2/Si/Sio2/Ti/Pt substrate, then select appropriate method to make top electrode of the film. Detect those film's dielectric properties and ferroelectric properties. Demonstrated the feasibility of fabricate PZT ultra-thin film by sol-gel method, then, analyzed thin film's properties.In the development of design of parallel SPM's related control circuits, designed DC bias circuit, multiplexer circuit, what's more, optimize the preamplifier circuit that used to pick up weak signals. Detected the properties and demonstrated the availability of circuits. Then, detected the properties of micro-cantilevers made by ourselves, integrated micro-cantilevers and circuits that are accomplished with AFM system, scanned Pt/Ti/SiO2/Si/Sio2/Ti/Pt sample's surfaces and achieved image with Certain precision.Finally, imaging technique of parallel SPM system is investigated. Completed the Programming of Planar imaging and three-dimensional imaging, the study of Algorithm that is used to change gray image to Pseudo-color image, the study of Algorithm to remove systematic errors and Programming, especially, investigated Image mosaic technologies in depth. Selected suitable Stitching algorithm, achieve accurate splicing with similarity of 96%, what's more, image's quality enhanced at the same time. Simulated real-time splicing process by software, and discuss real-time splicing's meaning by analyzing the experimental data.